The Model 3022 is a piezoresistive silicon accelerometer packaged in a ceramic substrate with a sealed ceramic cover. The ceramic provides an excellent bonding surface for the customers application specific adhesive. The accelerometer consists of a micro machined silicon mass suspended by multiple beams from a silicon frame. Piezoresistors located in the beams change their resistance as the motion of the suspended mass changes the strain in the beams. Silicon caps on the top and bottom of the device are added to provide overrange stops. This design provides for a very low profile, high shock resistance, durability and built-in damping over a wide usable bandwidth. For an accelerometer with a mounting bracket designed to bolt the sensor to a mounting location, see the Model 3028. Please refer to the Models 3052 and 3058 for accelerometers with integral temperature compensation.
• Piezoresistive MEMS
• PC board mountable accelerometer
• Millivolt output
• Low cost
• Designed for PCB or adhesive mounting
• ±0.5% non-linearity (typical)
• DC response
• Gas damping
• Built-in over-range stops
• Low power
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